Assemblies for plasma-enhanced treatment of substrates

ABSTRACT

Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.

TECHNICAL FIELD

Plasma-generating structures, display devices, plasma-enhancedtreatments, methods of forming plasma-generating structures; methods ofplasma-assisted etching, and methods of plasma-assisted deposition.

BACKGROUND

Plasmas have numerous applications in research and industry. Forinstance, plasmas may be utilized for one or both of plasma-assistedetching and plasma-assisted deposition during fabrication ofsemiconductor devices. As another example, plasmas may be utilized inanalytical devices, such as mass spectrometers and inductively coupledplasma atomic emission spectroscopy (ICPAES) devices. As yet anotherexample, plasmas may be utilized in displays to induce visible changesin phosphors or other materials.

Although there are many uses for plasmas, the utilization of plasmas hasbeen hindered by difficulties encountered in fabricatingplasma-generating structures. Such structures are often large andexpensive. There have been some efforts to develop arrays ofplasma-generating microstructures by micromachining. Such arrays couldbe useful in numerous applications if they could be cheaply producedwithin desired tolerances. It would be desirable to develop new methodsfor fabrication of plasma-generating structures that may be incorporatedinto existing fabrication processes, and that can form arrays ofplasma-generating microstructures. It would also be desirable to developnew assemblies and uses for the plasma-generating microstructures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 and 2 are a top view and a cross-sectional side view,respectively, of a portion of a construction at a processing stage inaccordance with an embodiment. The cross-section of FIG. 2 is along theline 2-2 of FIG. 1.

FIGS. 3 and 4 are views of the portions of FIGS. 1 and 2 shown at aprocessing stage subsequent to that of FIGS. 1 and 2. The cross-sectionof FIG. 4 is along the line 4-4 of FIG. 3.

FIG. 5 illustrates an embodiment for forming the openings shown in FIGS.3 and 4.

FIG. 6 illustrates the portion of FIG. 1 at a processing stagecomparable to that of FIG. 3, and shows an embodiment alternative tothat of FIG. 3.

FIG. 7 illustrates the portion of FIG. 1 at a processing stagesubsequent to that of FIG. 1, and prior to that of FIG. 3, in accordancewith an embodiment.

FIG. 8 illustrates the portion of FIG. 2 at a processing stagesubsequent to that of FIG. 2, and prior to that of FIG. 4, in accordancewith an embodiment.

FIGS. 9-11 are views of the construction of FIGS. 1 and 2 shown at aprocessing stage subsequent to that of FIGS. 3 and 4. FIGS. 9 and 10 areviews of the portions of FIGS. 1 and 2, respectively, and FIG. 11 is aview along a cross-section parallel to the top view of FIG. 9. Thecross-section of FIG. 10 is along the lines 10-10 of FIGS. 9 and 11, theview of FIG. 9 is along the line 9-9 of FIG. 10, and the cross-sectionof FIG. 11 is along the line 11-11 of FIG. 10.

FIG. 12 is a diagrammatic, cross-sectional view of an assembly utilizedto treat a substrate in accordance with an embodiment.

FIG. 13 is a diagrammatic, cross-sectional view of another assemblyutilized to treat a substrate in accordance with an embodiment.

FIG. 14 is a diagrammatic, cross-sectional view of another assemblyutilized to treat a substrate in accordance with an embodiment.

FIG. 15 is a top view of a construction comprising a plurality ofplasma-generating structures in accordance with an embodiment.

FIG. 16 illustrates the portion of FIG. 2 at a processing stageanalogous to that of FIG. 10, in accordance with another embodiment.

FIG. 17 is a diagrammatic, cross-sectional view of an assembly utilizinga plurality of plasma-generating microstructures to selectively treatregions of a semiconductor substrate.

FIG. 18 is a view of the assembly of FIG. 17 shown at a stage subsequentto that of FIG. 17 in accordance with an embodiment in which thesubstrate is etched by plasmas formed with the microstructures.

FIG. 19 is a view of the assembly of FIG. 17 shown at a stage subsequentto that of FIG. 17 in accordance with an embodiment in which material isdeposited utilizing plasmas formed with the microstructures.

FIG. 20 is a cross-sectional side view of a portion of a display inaccordance with an embodiment.

FIGS. 21-23 are views of the construction of FIGS. 1 and 2 shown at aprocessing stage subsequent to that of FIGS. 9-11. FIGS. 21 and 22 areviews of the portions of FIGS. 1 and 2, respectively, and FIG. 23 is aview along a cross-section parallel to the top view of FIG. 21. Thecross-section of FIG. 22 is along the lines 22-22 of FIGS. 21 and 23,the view of FIG. 21 is along the line 21-21 of FIG. 22, and thecross-section of FIG. 23 is along the line 23-23 of FIG. 22.

FIGS. 24 and 25 are views of a construction at a processing stageanalogous to that of FIGS. 3 and 4, in accordance with anotherembodiment. FIG. 24 is a top view of a portion of the construction, andFIG. 25 is a cross-sectional side view of the portion. The view of FIG.25 is along the line 25-25 of FIG. 24.

FIGS. 26-28 are views of the construction of FIGS. 24 and 25 at aprocessing stage subsequent to that of FIGS. 24 and 25. FIGS. 26 and 27are views of the portions of FIGS. 24 and 25, and FIG. 28 is a viewalong a cross-section parallel to the top view of FIG. 26. Thecross-section of FIG. 27 is along the lines 27-27 of FIGS. 26 and 28,the view of FIG. 26 is along the line 26-26 of FIG. 27, and thecross-section of FIG. 28 is along the line 28-28 of FIG. 27.

FIGS. 29-31 are views of the construction of FIGS. 24 and 25 at aprocessing stage subsequent to that of FIGS. 26-28. FIGS. 29 and 30 areviews of the portions of FIGS. 24 and 25, and FIG. 31 is a view along across-section parallel to the top view of FIG. 29. The cross-section ofFIG. 30 is along the lines 30-30 of FIGS. 29 and 31, the view of FIG. 29is along the line 29-29 of FIG. 30, and the cross-section of FIG. 31 isalong the line 31-31 of FIG. 30.

FIG. 32 is a diagrammatic, cross-sectional view of an assembly utilizedto treat a substrate in accordance with an embodiment.

FIG. 33 is a cross-sectional side view of a portion of a display inaccordance with an embodiment.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Some embodiments utilize highly ordered anodic alumina nanochannelarrays as a base to build an array of hollow cathode plasma-generatingstructures. The plasmas formed within such structures may be highdensity (in other words, may comprise a density of at least 10¹¹ions/cm³). Individual portions of the array may be independentlycontrolled relative to other portions, and a smallest independentlycontrolled unit may be defined as a plasma element, or plasma cell. Thearray of plasma-generating structures may have numerous uses, which mayinclude utilization in various fabrication processes, display units,medical applications, remote sensor applications, chemical analysisapplications, and/or material processing applications. For instance, thearray of plasma-generating structures may be utilized for generatingdisplay patterns, for surface treatments, for forming electron beamarrays, for forming ion arrays, for material deposition, for materialetching, for micro-chemical analysis, and/or for sterilization. Someembodiments are described with reference to FIGS. 1-33.

Referring to FIGS. 1 and 2, a portion of a semiconductor construction 10is illustrated in top view (FIG. 1) and cross-sectional side view (FIG.2). The construction comprises a base 12 which supports a conductivematerial 14, and which supports a material 18 over the conductivematerial 14.

The material 18 may be an aluminum-containing material, and accordinglymay comprise, consist essentially of, or consist of aluminum. Thealuminum-containing material 18 may have a thickness of less than 100microns, less than 50 microns, or less than 10 microns, in someembodiments.

The base 12 may comprise semiconductor material, and may, for example,comprise, consist essentially of, or consist of monocrystalline silicon.The base may be considered to be at least part of a semiconductorsubstrate. The terms “semiconductive substrate,” “semiconductorconstruction” and “semiconductor substrate” mean any constructioncomprising semiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials), and semiconductive materiallayers (either alone or in assemblies comprising other materials). Theterm “substrate” refers to any supporting structure, including, but notlimited to, the semiconductive substrates described above.

Although base 12 is shown to be homogenous, the base may comprisenumerous layers in some embodiments. For instance, base 12 maycorrespond to a semiconductor substrate containing one or more layersassociated with integrated circuit fabrication. In such embodiments,such layers may correspond to one or more of metal interconnect layers,barrier layers, diffusion layers, insulator layers, etc.

The material 14 may comprise any suitable electrically conductivecomposition or combination of compositions, and may, for example,comprise, consist essentially of, or consist of any of various metals(for instance, platinum, tungsten, titanium, etc.), metal-containingcompositions (for instance, metal silicides, metal nitrides, etc.), andconductively-doped semiconductor materials (for instance,conductively-doped silicon, conductively-doped germanium, etc.). Thematerial 14 may be electrically coupled with integrated circuitry (notshown) extending within base 12 so that current flow within material 14may be controlled through such integrated circuitry.

In some embodiments, material 14 together with base 12 may be considereda semiconductor substrate.

Referring to FIGS. 3 and 4, construction 10 is shown afteraluminum-containing material 18 (FIGS. 1 and 2) is subjected toanodization to convert material 18 to an aluminum oxide-containingmaterial 20, and to form a plurality of openings 22 extending throughthe aluminum oxide-containing material. The aluminum oxide-containingmaterial 20 may comprise, consist essentially of, or consist of aluminumoxide; and may be referred to as an aluminum oxide-containing body. Thediagrams of FIGS. 3 and 4 are approximations to the actual structure ofanodic alumina, and in some embodiments the anodic alumina may appeardifferent than illustrated in FIGS. 3 and 4. For instance, in someembodiments the pores may appear more rounded with a small degree ofhexagonal character, with boundaries between the cells appearingsubstantially hexagonal. Pore widening with a chemical etch (such as 5volume % phosphoric acid at 30° C. for 2-15 minutes) may produce poreswith more hexagonal character and thinner walls, which would be similarto those of FIGS. 3 and 4.

The openings have depths extending along a first axis 25 (shown in FIG.4), and widths extending along a second axis 27 (shown in FIG. 3), withthe second axis being approximately orthogonal to the first axis. Thewidths have a maximum dimension, and such maximum dimension may be fromabout 100 Å to about 2000 Å in some embodiments.

The anodization is shown forming openings extending through the aluminato underlying material 14, as may occur if the underlying material 14begins anodizing (which may occur if material 14 comprises one or moreof Si, Ti, Ta, Cr, etc.). In such embodiments, the anodization ofmaterial 14 may create an oxide, which may subsequently be removed toleave the structure shown in FIGS. 3 and 4. Such removal may beaccomplished by, for example, a chemical etch (for instance, aphosphoric acid etch or a chromic acid etch), or by a plasma etch (forinstance, sputtering with Ar). More specifically, the alumina, whenfully anodized to an underlying metal 14, can have a thin alumina layerat the bottom of the pore, separating the pore and the underlying metal.This alumina at the base of the pore may be etched out with phosphoricor chromic acid (which may also cause pore widening) or with a sputterdry etch (which may maintain the pore width). Alternatively, when thealuminum is fully anodized, converted to alumina, and if 14 is asuitable “valve” metal, then further anodization of the system mayresult in the pore extending through the total alumina thickness, with anew oxide front and continuation of pore forming in the underlyingmetal. This new oxide of metal 14 can be removed with a suitable dry orwet etch tailored to that oxide.

The anodization may be conducted with an apparatus of the type shown inFIG. 5 as apparatus 30. Such comprises a vessel 32 retaining anelectrolytic solution 34. Construction 10 is provided within suchsolution as an anode, and a cathode 36 is also provided within thesolution. A power source 38 is utilized to provide sufficient powerbetween the anode and the cathode to cause anodization of thealuminum-containing material associated with the anode.

The cathode 36 may comprise any suitable material, and may, for example,comprise, consist essentially of, or consist of platinum or graphite.

The composition and temperature of solution 34 may be tailored to formthe openings 22 to a desired size within a desired time period. Forinstance, the anodization media may comprise various acids, such assulfuric acid, phosphoric acid or oxalic acid. A temperature of theanodization media may be below about 20° C., and in some embodiments maybe about 4° C. The low temperature may avoid localized heat build-up atan anodization front, which could otherwise lead to non-uniformanodization.

Pore size (or diameter), d_(pore), and pore spacing, d_(cell), of theanodized material may be influenced by the acid electrolyte used, and bythe voltage at which the anodization is carried out. These twoinfluences may be tied together, and thus there may be a particularvoltage that works particularly well for a given electrolytecomposition. Pore diameter may vary with applied voltage by betweenabout 0.5 nm/V (nanometer per volt) and 1 nm/V, and may also dependsomewhat on the acid (and acid concentration) used, with an order ofincrease of some example acids being: sulfuric<oxalic<phosphoric.Independent of electrolyte, the interpore spacing may increase by fromabout 2 nm/V to about 3 nm/V. The ratio d_(pore)/d_(cell) may be atleast partially controlled by electric field strength, with the ratiodecreasing at higher field strengths.

The anodization may comprise a multi-step process. Initially, a firstanodization may be conducted to form initiation points of the openings.Once the initiation points of the openings are formed, a top surface ofaluminum oxide may be stripped with a chromic acid etch, andsubsequently the openings may be further extended into or throughaluminum-containing material 18 (FIGS. 1 and 2) with additionalanodization. The anodization may ultimately convert all of the aluminumof material 18 to alumina (i.e., aluminum oxide).

The stripping of the top surface of the aluminum oxide may beaccomplished with any suitable process, and may, for example, beaccomplished utilizing a mixture of phosphoric acid and chromic acid(for instance, the etching solution may be made by mixing 20 grams ofchromic acid with 35 milliliters of 85% phosphoric acid, followed bydilution of the mixture to 1 liter with deionized water at 85° C.).Another etching chemistry that may be utilized is 175 grams/literchromic acid mixed equally with 35 grams/liter sulfuric acid at 50° C.

Referring again to FIG. 3, the anodization has formed openings 22 to behexagonal, as is conventional for anodization of aluminum. The openingsare in a hexagonally closest-packed arrangement. A possible mechanismfor the pore organization into the hexagonally-closest packedarrangement is that competition for anodizing volume, and resultantstress fields, cause the pores to coalesce and align in the mostefficient manner, which is a hexagonal closest-packed arrangement.

In some embodiments, the openings will be in an approximatelyhexagonally closest-packed arrangement, rather than in the perfectarrangement shown in FIG. 3. An approximately hexagonally closest-packedarrangement is an arrangement which is primarily hexagonallyclosest-packed, but which may deviate from perfect hexagonalclosest-packing due to practical constraints in achieving a hexagonalclosest-packed arrangement, with such constraints including, forexample, practical limitations in the homogeneity of the startingaluminum-containing material in purity, crystalline orientation, etc.;and practical limitations in the homogeneity of the exposure of thealuminum-containing material to anodization conditions during theanodization process of, for example, FIG. 5. Deviations from perfecthexagonal periodicity may also be caused by variations in local chemicalgradients (chemical diffusion), as well as local variations intemperature due to inhomogeneous cooling, and/or local reaction rates(due to variations in anodization conditions).

The aluminum-containing material 18 (FIGS. 1 and 2) may be comprised ofnumerous individual crystalline grains. Such grains will join to oneanother at interfaces (or boundaries). The anodization may producehexagonally closest-packed arrangements within the individual grains,with the arrangement associated with one grain being out of alignmentrelative to an arrangement associated with an adjacent grain, as isdiagrammatically illustrated in FIG. 6. Specifically, approximatelocations of grain boundaries are illustrated with lines 23, andhexagonal closest-packed arrangements within different grains are shownto be slightly out of alignment relative to one another so that thehexagonal closest-packed arrangements do not form patterns extendingacross the grain boundaries. The embodiment of FIG. 6 may still havehexagonal closest-packed openings extending across the majority of atotal area of an aluminum oxide-containing body, but the hexagonalclosest-packed openings will be distributed amongst a plurality ofseparate and non-interlocking arrangements. The deviations of FIG. 6 ofhaving some hexagonally closest-packed arrangements out of alignmentrelative to others may also result from other influences in addition to,or alternatively to, grain boundaries.

One method of forcing a hexagonal closest-packed arrangement to extendacross grain boundaries is described with reference to FIG. 7.Specifically, a plurality of divots or dents 19 are imparted to asurface of aluminum-containing material 18 prior to the anodization. Thedents are in a pattern corresponding to the centers of hexagonallyclosest-packed openings desired to be formed during the anodization. Thedents may provide starting points for the anodization occurring withinmaterial 18, and accordingly may force a pattern of hexagonalclosest-packing to extend across an entirety of the oxide formed frommaterial 18, including extending across grain boundaries. The dents maybe formed by any suitable method. An example method is to press atemplate against material 18. Another example method is to provide apatterned mask over material 18, and subsequently transfer a patternfrom the mask into material 18 with a suitable etch. Another method isto use ion beam etching. In some embodiments, pore patterns may beinduced into desired geometries from bottom-up using pits in an aluminumsubstrate. In some embodiments, pits or posts may be made in or underthe material 14 underlying the aluminum, and then the aluminum may bedeposited over this textured base to create a topography along thebottom of the aluminum that may be used to induce a pattern in thealuminum.

Other patterns of the pores, besides hexagonal closest-packing may beinduced with an appropriate template of divots or pits across analuminum substrate. For instance, square or triangular patterns may beinduced with appropriate templating.

In the embodiment of FIGS. 3 and 4, openings 22 penetrate entirelythrough aluminum oxide-containing material 20 to the underlyingconductive material 14. Such may be accomplished in a single anodizationstep if material 14 is conducive to the anodization. In suchembodiments, the anodization may extend openings 22 at least partiallyinto material 14. In other embodiments, the anodization may extendopenings 22 only partially through aluminum oxide-containing material 20to leave a film of aluminum oxide-containing material across a bottom ofthe openings.

FIG. 8 illustrates an embodiment in which the anodization has formedopenings 22 to extend only partially through aluminum oxide-containingmaterial 20. A film of the aluminum oxide-containing material remainsalong bottoms of the openings 22. In subsequent processing, such filmmay be removed by a dry etch, or a wet etch, to form the construction ofFIG. 4. Alternatively, the oxide may be left at the bottoms of theopenings so that the openings 22 extend into, but not through, aluminumoxide-containing material 20.

Referring next to FIGS. 9-11, electrically conductive material 40 isdeposited over aluminum oxide-containing body 20 and within openings 22.The conductive material 40 may comprise any suitable composition orcombination of compositions; and may, for example, comprise one or moreof various metals, metal-containing compositions and conductively-dopedsemiconductor materials. In some embodiments, material 40 may comprise,consist essentially of, or consist of titanium nitride.

The material 40 lines openings 22, and forms hollow cathodes within theopenings. Some of the hollow cathodes are labeled 42, 44 and 46 in FIGS.9-11.

The hollow cathodes may be referred to as plasma-generating structures.Specifically, energy may be provided to the conductive material 40sufficient to generate plasmas within the hollow cathodes, and tomaintain such plasmas for a desired duration. The energy may beradiofrequency (RF) energy to form inductively-coupled plasmas orcapacitively-coupled plasmas. In forming inductively-coupled plasmas,the RF coupling mechanism may be primarily one of inductive nature, andin forming capacitively-coupled plasmas the RF coupling mechanism may beprimarily one of capacitive nature. In some embodiments, the plasmas maybe high-density plasmas.

FIG. 12 shows an assembly 50 comprising construction 10 inverted over asubstrate 51. Plasmas 52, 54 and 56 are generated and maintained withinhollow cathodes 42, 44 and 46, respectively. In some embodiments,current is passed to conductive material 40 from conductive material 14to provide the energy that generates and maintains the plasmas. Currentflow through material 14 is controlled by circuitry 58 that isdiagrammatically illustrated in FIG. 12. Such circuitry may be at leastpartially comprised by integrated circuitry associated withsemiconductor base 12, and in some embodiments may be wholly comprisedby such integrated circuitry. The circuitry may have a layout ofcomponents similar to that described in J. Hopwood et. al. “Fabricationand Characterization of a Micromachined 5 mm Inductively Coupled PlasmaGenerator” J. Vac. Sci. Technol. B. 18(5), pp. 2446-2451September/October 2000.

The plasmas 52, 54 and 56 may be referred to as micro-plasmas, in thatthey are very small (with each being less than a thousand angstroms inmaximum cross-sectional dimension in some embodiments). The individualmicro-plasmas may be maintained with less than or equal to about onewatt of RF power in some embodiments.

Substrate 51 may comprise any substrate desired to be treated with aplasma-enhanced treatment method. For instance, the substrate maycorrespond to a medical device which is to be sterilized, and/or to aregion of a patient which is to be sterilized; may correspond to asemiconductor substrate which is to be subjected to plasma-enhanceddeposition or etching; may correspond to a material which is to receiveion beams or electron beams generated by a plasmas to stimulate avisible change within the material to create a display; and/or maycorrespond to a material which is to be subjected to chemical analysis,or other analysis, utilizing the plasmas.

Substrate 51 may be directly against construction 10, or may be spacedfrom the construction by a gap (as shown). If substrate 51 is spacedfrom construction 10 by a gap, such gap may be, for example, less thanor equal to about 5 millimeters.

The substrate may be retained in a desired orientation relative to theplasma-generating structures utilizing any suitable assembly. FIGS. 13and 14 illustrate example assemblies which may be utilized. In referringto FIGS. 13 and 14, similar numbering will be used as is utilized abovein describing FIG. 12, where appropriate.

FIG. 13 shows an assembly 60 comprising construction 10 (shown morediagrammatically in FIG. 13 than in FIG. 12) retained above substrate51. The substrate is retained in a substrate holder 62, and construction10 is retained by a holder 64. The construction 10 comprises hollowcathodes 42, 44 and 46, and additionally comprises another pair ofhollow cathodes 66 and 68. Although five hollow cathodes are shown,there may be many more hollow cathodes in other embodiments, and theremay, for example, be hundreds, thousands, or more hollow cathodes.

FIG. 14 shows an assembly 70 in which construction 10 is retained withina substrate holder 72. The construction 10 and substrate holder maytogether be considered a chuck suitable for retaining a substrate. Thesubstrate holder comprises a lip 74 which holds the substrate 51 in anelevated position above construction 10, with a gap being between thesubstrate and the construction 10. The construction 10 comprises thehollow cathodes 42, 44 and 46 discussed above, and additionallycomprises hollow cathodes 73, 75 and 77 in the shown embodiment. Theembodiment of FIG. 14 has a portion of a substrate-retaining structure72 below the substrate 51 retained in the structure, and has an entiretyof the plurality of hollow cathode plasma-generating structures 42, 44,46, 73, 75 and 77 below the substrate 51.

In the embodiment of FIG. 12, all of the plasma-generating structures42, 44 and 46 form plasmas simultaneously. In other embodiments, one ormore plasma-generating structures may be separately controlled relativeto others. The plasma-generating structures having plasma therein may bereferred to as being lit, and the plasma-generating structures that donot have plasma therein may be referred to as being unlit. The separatecontrol of one or more plasma-generating structures relative to othersmay enable a plurality of plasma-generating structures to form a patternof lit and unlit structures. Such pattern may enable the plurality ofplasma-generating structures to form a treatment pattern across asubstrate, and/or to form a display pattern within a screen.

In embodiments in which one or more plasma-generating structures areseparately controlled relative to others, the smallest controlled unitof plasma-generating structures may be referred to as a plasma element.In some embodiments, a plasma element may correspond to a singleplasma-generating structure. In other embodiments, the plasma elementmay correspond to two or more individual plasma-generating structures.

FIG. 15 shows a top view of a construction 80 comprising a plurality ofplasma-generating structures 82. The plasma-generating structures may behollow cathodes formed within alumina, and thus construction 80 may berepresentative of a construction identical to that shown in FIG. 9. Theplasma-generating structures of FIG. 15 are arranged in sets 84, 86, 88,90, 92 and 94; with such sets being diagrammatically bounded by dashedlines 83. Each of the sets corresponds to a separate plasma element.Thus, each set is separately controllable relative to the others so thatthe sets may be individually lit relative to one another. In someembodiments, the plasma-generating structures are formed as a vast arrayof microstructures across a sheet of aluminum. In such embodiments theremay be at least 50 plasma elements, at least 100 plasma elements, atleast 1000 plasma elements, at least one million plasma elements, oreven more plasma elements associated with a single construction. In someembodiments, the individual plasma elements may have sizes less than 10micron².

FIG. 16 is a cross-sectional view of a portion of a construction 100similar to the construction 10 of FIG. 10, but illustrating how multipleplasma elements may be separately controlled relative to one another.Similar numbering will be used in describing FIG. 16 as is used above indescribing FIG. 10, where appropriate.

Construction 100 comprises the base 12, aluminum oxide-containing body20, and conductive material 40 discussed above. However, in contrast tothe construction of FIG. 10, construction 100 comprises a plurality ofconductive layers 102, 104 and 106 electrically coupling to conductivematerial 40. Further, construction 100 comprises insulative material 108forming breaks in the conductive material 40, and accordingly formingelectrically isolated segments of conductive material 40. Theelectrically insulative material 108 may comprise any suitablecomposition or combination of compositions; and may, for example,comprise, consist essentially of, or consist of one or more of silicondioxide, silicon nitride and silicon oxynitride. Material 108 may beformed with any suitable processing, including, for example, utilizing aphotolithographically patterned mask to define regions where thematerial will be deposited; etching to remove material 40 from suchregions; deposition of material 108; and subsequent removal of the mask.

The segments of conductive material 40 are incorporated into separateplasma elements 110, 112 and 114. Plasma element 112 comprises a singlehollow cathode plasma-generating structure, whereas plasma element 114comprises at least three hollow cathode plasma-generating structures.Each plasma element may be separately lit relative to the others bycontrolling flow of current into the electrical connectors 102, 104 and106. Such control may utilize integrated circuitry (not shown)associated with base 12.

The control of separate plasma elements may enable numerous applicationsin which some portions of the substrate are treated differently thanothers. FIGS. 17-19 illustrate a couple of example applications.

Referring to FIG. 17, an assembly 120 comprises a plasma-generatingconstruction 122 and a semiconductor substrate 124. The construction 122comprises a plurality of hollow cathode plasma-generating structures126, 128, 130, 132 and 134. Such hollow cathode plasma-generatingstructures may correspond to metal-lined openings extending intoalumina, and accordingly may correspond to structures of the type shownin FIG. 16.

Plasmas 123 is shown to be within only some of the plasma-generatingstructures. Specifically, the plasma-generating structures 126, 128 and134 are lit, and the structures 130 and 132 are unlit.

Referring to FIG. 18, assembly 120 is shown after utilization of theplasmas 123 for a plasma-assisted etch of substrate 124. Such etch maybe conducted by flowing etchant material between construction 122 andsubstrate 124, providing a bias between construction 122 and substrate124, and utilizing one or more species generated by plasmas 123 toperform the etch. The etching occurs in a pattern related to the patternof the lit and unlit plasma-generating structures. Accordingly, thepattern of lit and unlit plasma-generating structures may be utilized toimpart a desired etch pattern into substrate 124.

Referring to FIG. 19, assembly 120 is shown at a processing stagefollowing that of FIG. 17, and specifically after utilization of theplasmas 123 for a plasma-assisted deposition of material 136 oversubstrate 124. Such deposition may be conducted by flowing reactantmaterial 138 between construction 122 and substrate 124, providing abias between construction 122 and substrate 124 (if desired), andutilizing plasmas 123 to enhance the deposition. The utilization of theplasmas may comprise interaction of the reactant material 138 with oneor more species in the plasmas (for instance, ions) and/or with one ormore species emitted by the plasmas (for instance, electrons, ions,photons, etc.; wherein the photons may correspond to ultraviolet light).The deposition occurs in a pattern related to the pattern of the lit andunlit plasma-generating structures. Accordingly, the pattern of lit andunlit plasma-generating structures may be utilized to impart a desireddeposition pattern onto substrate 124.

In some embodiments, the deposited material may comprise componentssputtered from the surfaces of the lit hollow cathodes 126, 128 and 134.For instance, if the surfaces comprise conductive material 40 as shownin FIG. 16, the plasmas may be generated under conditions that sputterthe conductive material from such surfaces. In some embodiments,multiple materials may be formed within the hollow cathodes, with thecomposition exposed along sidewalls of the hollow cathodes being acomposition which is desired to be sputter-deposited onto a substrate.In other embodiments, conditions may be chosen which create littlesputtering from the surfaces of the hollow cathodes, so that thematerial deposited on the substrate is substantially entirely formedfrom reactant flowed between the hollow cathodes and the substratesurface. Such conditions may include forming a coating across the hollowcathodes which reduces an amount of sputtering from exposed surfaces ofthe hollow cathodes.

In addition to having applications for treatment of various surfaces,the control of separate plasma elements may have applications fordisplays. FIG. 20 shows an assembly 140 comprising a plasma-generatingconstruction 142 and a display screen 144 proximate such construction.

The construction 142 comprises the base 12 and alumina-containing body20 discussed above (for instance, discussed with reference to FIG. 16).The construction also comprises conductive material 40 defining hollowcathodes 146, 148, 150, 152 and 154 within the openings. An insulativematerial 155 electrically isolates one segment of conductive material 40from another segment, similar to the isolation achieved by material 108in FIG. 16. The material 155 may comprise any of the compositionsdiscussed above relative to material 108. Construction 142 additionallycomprises a conductive interconnect 156 connecting to conductivematerial 40 of hollow cathodes 146, 148 and 150; and comprises anotherconductive interconnect 158 connecting to conductive material 40 ofhollow cathodes 152 and 154. Conductive interconnects 156 and 158 areconnected to circuitry (not shown) which controls current flow throughthe interconnects. The current flow through one interconnect may beindependently controlled relative to the current flow through the otherinterconnect. Accordingly, the hollow cathodes 146, 148 and 150 are partof one plasma element, and the hollow cathodes 152 and 154 are part ofanother plasma element.

A grid 160 is formed across outermost regions of construction 142between the hollow cathodes. The grid comprises a conductive material162, and is shown spaced from conductive material 40 by dielectricspacers 164. The grid may be utilized for focusing particles ejectedfrom plasmas within the hollow cathodes, with example particles beingelectrons, ions and photons. The conductive material 162 may compriseany suitable composition or combination of compositions, and may, forexample, comprise one or more of metals, metal-containing compositions,and conductively-doped semiconductor material. Dielectric material 164may comprise any suitable composition or combination of compositions,and may, for example, comprise one or both of silicon dioxide andsilicon nitride.

Screen 144 comprises one or more compositions which visually change uponbeing stimulated by particles emitted from plasmas proximate the screen.Such compositions may include various phosphors.

Hollow cathodes 146, 148 and 150 are shown to have plasmas 166 therein(i.e., are shown lit), while hollow cathodes 152 and 154 have no plasmatherein (i.e., are shown unlit). The lit plasmas eject particles 168toward the display screen. Such particles may be focused by grid 160.The particles emitted from a single plasma element (for instance, theelements comprising cathodes 146, 148 and 150) may correspond to asingle pixel in the display screen. The pattern of the plasmas formed inthe hollow cathodes may form patterns of particles (for instance,electron beam patterns or ion beam patterns) which in turn form pixelpatterns in the display.

The embodiments shown in FIGS. 12, 16 and 20 have conductive material 40as the outermost material within the hollow cathodes. In otherembodiments dielectric material may be formed over the conductivematerial prior to generating plasmas within the hollow cathodes. FIGS.21-23 show a processing stage subsequent to that of FIGS. 9-11 in whicha dielectric material 180 is formed over the conductive material 40. Thedielectric material 180 forms exposed inner surfaces of the hollowcathodes, and may protect material 40 from being sputtered by plasmasformed within the hollow cathodes. Alternatively, the dielectricmaterial may be material which is desired to be sputter-depositedthrough utilization of the plasmas. The dielectric material may compriseany suitable composition or combination of compositions, and may, forexample, comprise, consist essentially of, or consist of one or both ofsilicon dioxide and silicon nitride.

In the embodiments discussed above, the alumina body 20 is supported bya semiconductor base 12. In other embodiments, the alumina body may beformed to be self-supporting, as discussed with reference to FIGS.24-31. In describing FIGS. 24-31, similar numbering will be used as isused above in describing FIGS. 1-4 and 21-23, where appropriate.

Referring to FIGS. 24 and 25, an alumina body 200 is illustrated at aprocessing stage similar to that of FIGS. 3 and 4, but without asupporting base. The alumina body comprises aluminum oxide-containingmaterial 20 having openings 22 extending therethrough. Alumina body 200may be formed utilizing anodization similar to that discussed above withreference to FIG. 5, but starting with a sheet of aluminum foil ratherthan with aluminum supported on a base. The alumina body 200 may have athickness of from several microns to several millimeters.

Referring to FIGS. 26-28, conductive material 40 is formed over thealumina body and within the openings to partially fill the openings (orother words, to line the openings). The conductively-lined openings forma plurality of hollow cathodes, with some of the hollow cathodes beinglabeled 202, 204 and 206. The hollow cathodes extend entirely throughthe alumina body.

Referring to FIGS. 29-31, dielectric material 180 is formed over thealumina body 200 and within the openings 22 to partially fill theopenings. In some embodiments dielectric material 180 may be omitted.

Hollow cathodes 202, 204 and 206 correspond to tubes extending entirelythrough body 200. The body has opposing surfaces 210 and 212 (shown inFIG. 30) through which the tubes extend. In subsequent processing,circuitry may be provided across one or both of such opposing surfacesto provide current which may generate plasmas within the hollowcathodes. Such circuitry may be configured to simultaneously formplasmas within all of the hollow cathodes, or may be configured toselectively form plasmas within some of the hollow cathodes relative toothers. Some of the circuitry may be provided before formation ofdielectric material 180 so that the circuitry directly contactsconductive material 40, or in other embodiments dielectric material 180may be kept thin enough so that the circuitry may be provided afterformation of dielectric material 180.

The constructions of FIGS. 26-28 and 29-31 are symmetric so that theymay be utilized to simultaneously treat two substrates. For instance,FIG. 32 shows body 200 of FIGS. 29-31 provided between a pair ofsubstrates 220 and 222. The body 200 comprises hollow cathodes 230, 232,234 and 236; and plasmas 235 are shown within the hollow cathodes 230,234 and 236. The plasmas may be utilized to simultaneously treat both ofthe substrates 220 and 222.

Another use for the symmetric constructions is to simultaneously displayinformation on opposing sides of the constructions. FIG. 33 shows body200 of FIGS. 26-28 provided between a pair of display screens 240 and242. A pair of grids 244 and 246 are shown on opposing sides of body200, with the grids comprising the conductive grid material 162discussed above with reference to FIG. 20, and with such material beingspaced from conductive material 40 by the dielectric material 164discussed with reference to FIG. 20.

A plurality of hollow cathodes 250, 252 and 254 extend through body 200.Plasmas 253 are within hollow cathodes 250 and 252, but not withinhollow cathode 254. The plasmas emit particles 255 that can causevisible changes within the display screens, and accordinglysimultaneously activate pixels in both display screens. The assembly ofFIG. 33 may be placed between a pair of rooms so that persons in oneroom may observe the same display as persons in an adjacent room. It isnoted that the display in screen 242 will be a mirror image of thedisplay in screen 240, which may have advantages in some situations.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

1. An assembly for plasma-enhanced treatment of a substrate, comprising:a plurality of hollow cathode plasma-generating structures; circuitryconfigured to provide current flow that generates and maintains plasmawithin at least some of the hollow cathodes; a substrate-retainingstructure configured to retain a substrate proximate the plurality ofhollow cathode plasma-generating structures; and wherein a smallest unitindependently controlled by the circuitry is defined as a plasmaelement, wherein there are a plurality of said plasma elementsconfigured for treating two or more regions of the substrate differentlyrelative to one another, and wherein at least one of the individualplasma elements contains two or more individual hollow cathodes.
 2. Theassembly of claim 1 wherein the plurality of plasma-generatingstructures is within an aluminum-oxide-containing body, wherein at leastsome of the circuitry is integrated circuitry associated with asemiconductor base; and wherein the aluminum-oxide-containing body isjoined to the semiconductor base.
 3. The assembly of claim 1 wherein atleast a portion of the substrate-retaining structure is below asubstrate retained in the substrate-retaining structure; and wherein anentirety of the plurality of hollow cathode plasma-generating structuresis below the substrate retained in the substrate-retaining structure. 4.The assembly of claim 1 wherein a gap is between the substrate retainedin the substrate-retaining structure and the plurality of hollow cathodeplasma-generating structures.
 5. The assembly of claim 4 wherein the gapis greater than 0 millimeters and less than or equal to about 5millimeters.
 6. The assembly of claim 1 comprising two substrateretaining structures configured to retain a first substrates substrateon one side of the plasma-generating structures and a second substrateon an opposing side of the plasma-generating structures; wherein thehollow cathode plasma-generating structures are tubes; and whereingeneration of plasmas within the tubes simultaneously treats the firstand second substrates.
 7. The assembly of claim 1 wherein there are atleast 50 of said plasma elements.
 8. The assembly of claim 1 whereinthere are at least 100 of said plasma elements.
 9. The assembly of claim1 wherein there are at least 1000 of said plasma elements.
 10. Theassembly of claim 1 wherein individual hollow cathodes correspond to atleast one of the plasma elements.
 11. The assembly of claim 1 whereinthe plasma-enhanced treatment comprises plasma-enhanced etching.
 12. Theassembly of claim 1 wherein the plasma-enhanced treatment comprisesplasma-enhanced deposition.